发明名称 |
Circuit and method of compensating for membrane stress in a sensor |
摘要 |
<p>A circuit and method for correcting a sense signal of a sensor (100) where the sense signal is reduced by a negative nonlinear error component introduced by membrane stress in a sensor structure (101). A first transducer (103) is disposed at a location (203) having substantial bending stress to produce a sense signal having a linear component and the nonlinear error component. A second transducer (102) is disposed at a location (202) with substantially zero bending stress to produce a sense signal having the nonlinear error component but a substantially zero linear component. The sense signal from the second transducer (102) is added to the sense signal from the first transducer (103) to correct the nonlinear error for producing a linear output sense signal (VOUT) of the sensor (100) which is representative of the physical condition. <IMAGE></p> |
申请公布号 |
EP0833137(A2) |
申请公布日期 |
1998.04.01 |
申请号 |
EP19970116849 |
申请日期 |
1997.09.29 |
申请人 |
MOTOROLA, INC. |
发明人 |
BASKETT, IRA E.;MCNEIL, ANDREW C. |
分类号 |
G01L1/22;G01L9/04;G01L9/00;G01L9/06;H01L29/84;(IPC1-7):G01L1/22 |
主分类号 |
G01L1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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