发明名称 |
Enhancement of hydrogenation of materials encapsulated by an oxide |
摘要 |
<p>A method for enhancing hydrogenation of oxide-encapsulated materials includes forming an injection layer having a low reflectivity of monatomic hydrogen on an oxide-encapsulated material, and hydrogenating the material with an atomic hydrogen source such as a hydrogen plasma. The method results in a significant decrease in hydrogenation time required to passivate the oxide-encapsulated materials.</p> |
申请公布号 |
EP0833377(A2) |
申请公布日期 |
1998.04.01 |
申请号 |
EP19970307393 |
申请日期 |
1997.09.22 |
申请人 |
XEROX CORPORATION |
发明人 |
NICKEL, NORBERT H.;WALKER, JACK |
分类号 |
C01B33/02;B01J19/08;C01B33/04;H01L21/30;H01L21/336;H01L29/786;(IPC1-7):H01L21/30 |
主分类号 |
C01B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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