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发明名称
PROCESS FOR PLASMA ENHANCED ANNEAL OF TITANIUM NITRIDE
摘要
申请公布号
EP0832311(A1)
申请公布日期
1998.04.01
申请号
EP19960916686
申请日期
1996.05.28
申请人
MATERIALS RESEARCH CORPORATION
发明人
FOSTER, ROBERT, F.;HILLMAN, JOSEPH, T.;ARORA, RIKHIT
分类号
C23C16/56;H01L21/28;H01L21/285;H01L21/321;(IPC1-7):C23C14/58
主分类号
C23C16/56
代理机构
代理人
主权项
地址
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