Tintenstrahldruckkopf und dessen Herstellungsverfahren

摘要

A printer head for ink jet recording is disclosed, comprising a single-crystal silicon substrate (101) pierced with holes, a zirconium oxide layer (103) which is brought into direct contact with the surface of the silicon substrate (101) or a silicon oxide layer on the surface of the silicon substrate (101) so as to cover one end of the holes in the silicon substrate (101), a lower electrode (104) provided on the zirconium oxide layer (103), a piezoelectric layer (105) provided on the lower electrode (104), and an upper electrode (106) provided on the piezoelectric layer (105). A process for the preparation of the above printer head for ink jet recording is also disclosed. The printer head for ink jet recording can support a piezoelectric substance having a high piezoelectricity, can exhibit a high head drive durability and can be produced in a high yield.