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发明名称
NEUTRAL PARTICLE BEAM SOURCE
摘要
申请公布号
JPH1083899(A)
申请公布日期
1998.03.31
申请号
JP19960260261
申请日期
1996.09.09
申请人
EBARA CORP
发明人
SAITO MASAO
分类号
H05H3/02;H01J27/02;H01J37/08;H01J37/252;H01J49/10;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H05H3/02;H01L21/306
主分类号
H05H3/02
代理机构
代理人
主权项
地址
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