| 摘要 |
PURPOSE: A laser annealing equipment is provided to reduce processing time with laser-scanning work done in short time by forming plural laser beams as well as using the laser beams at the same time. CONSTITUTION: A laser generation unit(41) generates and supplies a laser beam. A beam split unit(43) splits the laser beam from the laser generation unit(41) into at least one or more laser beams. Plural optical systems(45-1, 45-2) process energies and profiles for looking into specimens for the splitted laser beams to be directly used to the specimens, and is structured for the processed laser beams to be longitudinally arranged. A laser anneal chamber directly uses the processed laser beams to the specimens, to thereby reduce process time.
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