| 摘要 |
PROBLEM TO BE SOLVED: To provide a transporting device capable of surly absorbing the expansion and deformation by the heat of a transporting car which is loaded with a material to be transported, such as a substrate, and transports this material with simple constitution. SOLUTION: This transporting device has a first rail 35 and a second rail 36 for guiding the transporting car 3 which is loaded with the substrate 2 in a progressing direction. A first supporting section which regulates the progressing direction of the transporting car 3 and supports the transporting car 3 is constituted of the first rail 35 and the first wheels 30, 31 of the transporting car 3. A second supporting section which supports the transporting car 3 freely slidably in the direction perpendicular to the progressing direction is constituted of the second rail 36 and the second wheels 32, 33 of the transporting car 3. A ball screw shaft 5 which transmits driving power to the transporting car 3 is disposed on the side nearer the first supporting section than the second supporting section. |
