| 摘要 |
PROBLEM TO BE SOLVED: To gretly improve the wear resistance of the inner peripheral surfaces of cylindrical members, such as various kinds of bushings or piston rings by forming an intermedite layer and a rigid carbon film with uniform thickness on the inner peripheral surfaces of the cylindrical members. SOLUTION: The cylindrical member 11 is arranged in a vacuum vessel 13 and an auxiliary electrode 23 consisting of an intermediate layer material is inserted into an aperture 11a forming its inner peripheral surface 11b. A sputtering gas is introduced into the vacuum vessel 13 and a voltage is impressed on this auxiliary electrode 23 to generate plasma on its circumference and to sputter the intermediate layer material, by which the intermediate layer is formed on the inner peripheral surface 11b of the cylindrical member 11. Gas contg. carbon, such as methane, is introduced into the vacuum vessel 13 and a voltage is impressed on the cylindrical member 11 to generate the plasma in the vacuum vessel 13, by which the hard carbon (DLC) film is formed on the intermediate layer of the inner peripheral surface 11b of the cylindrical member 11. |
