MICRO-MECHANICAL SENSOR FOR SHAPE MEASURING WITH AFM/ STM

摘要

PROBLEM TO BE SOLVED: To provide a micro-mechanical sensor for measuring shape with an atomic force microscopic microscope(AFM)/a scanning tunnel microscope(STM) which has sufficient mechanical rigidity and is appropriate for measuring an extremely deep and narrow structure having a positive flank angle. SOLUTION: The micro-mechanical sensor includes a bar 2, with a tip 1 existing for interaction with a test face to be sampled on one of its ends, while a fixing block for fixing the bar 2 exists at the other end of the bar 2. The tip 1 includes a basically conic shank 1a having a dish-shaped tip part 1b.