发明名称 Buffered substrate for semiconductor devices
摘要 The invention provides a buffered substrate that includes a substrate, a buffer layer and a silicon layer. The buffer layer is disposed between the substrate and the silicon layer. The buffer layer has a melting point higher than a melting point of the substrate. A polycrystalline silicon layer is formed by crystallizing the silicon layer using a laser beam.
申请公布号 US5733641(A) 申请公布日期 1998.03.31
申请号 US19960656460 申请日期 1996.05.31
申请人 XEROX CORPORATION 发明人 FORK, DAVID K.;BOYCE, JAMES B.;MEI, PING;READY, STEVE;JOHNSON, RICHARD I.;ANDERSON, GREG B.
分类号 H01L21/02;H01L21/20;H01L21/205;H01L21/336;H01L27/12;H01L29/786;(IPC1-7):B32B15/00 主分类号 H01L21/02
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