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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5255390(A)
申请公布日期
1977.05.06
申请号
JP19750130670
申请日期
1975.10.30
申请人
NIPPON ELECTRIC CO
发明人
NAKAMURA MASARU
分类号
H01L21/3205;H01L21/288
主分类号
H01L21/3205
代理机构
代理人
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