| 摘要 |
The method of coating is designed especially to produce coatings made of infusible materials. It consists in producing impulse plasma between accelerator electrodes as a result of high-current arc discharge in a working gas. The plasma is used to erode the internal electrode, and the obtained ions, atoms and aggregates are transported to the coated surface in a stream of plasma. Characterized in that: A glow discharge is produced in the interval between successive plasma impulses in the vacuum chamber (KP), near the substrate to be coated (POS). The surface of the substrate to be coated (POS) and/or the deposited coating (P) are implanted with ions of the working gas, while high tension between electrodes (POS, EWJ) is maintained.
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