| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to suppress unnecessary light intensity attributable to four corner parts, by providing a light shielding layer at the four corner parts in a half-light transmission part formed into a rim shape in the periphery of the light-transmission part. SOLUTION: Regions not contributing to the phase shift effect in a half-tone type phase shift mask are analyzed in detail and these regions are provided with the light shielding layer. Namely, the light shielding layer 4 is provided at the four corner areas in the half-light transmission part 3 formed to the rim shape at the periphery of the light-transmission part 2. Consequently, the unnecessary light intensity is suppressed compared with the case where the light shielding layer 4 is not provided at the four corner parts in the half-light transmission part 3. Further, it is preferable to keep the width of the half- transmission part 3 to be 0.3 to 0.8×(λ/NA) form the standpoint of maintaining the light intensity characteristic of a principal pattern and suppressing a side peak. At this point,λand Na indicate the wavelength of exposed light and numerical aperture of a stepper, respectively. Thus, the unnecessary light intensity attributable to the four corner parts is suppressed and leakage light from the half-light transmission part 3 is reduced.</p> |
