| 摘要 |
PROBLEM TO BE SOLVED: To prolong an operating time between two required maintenance operations. SOLUTION: This method for producing a single crystal comprises pulling up the single crystal from a melt according to a Czochralski(CZ) process in a pulling up chamber flushed with an inert gas. The method comprises (a) providing the first inner chamber 14 and the second inner chamber respectively defined by lateral faces, the upper parts and bottom boundaries in a pulling up chamber 1, (b) feeding the first inert gas stream through an upper boundary of the first inner chamber 14 into the first inner chamber 14 housing a thermal shield 7 arranged around the single crystal 3 and a crucible 5a containing a melt 4 and (c) feeding the second inert gas stream through a bottom boundary of the second inner chamber housing a heater 9 for heating the crucible 5a into the second inner chamber. Thereby, the first inert gas and the second inert gas cannot be mixed only after emerging the inner chambers at the earliest. |
