发明名称 |
Pre-wet system for a filter |
摘要 |
The present invention is a prewet system for a filter. The present invention includes a power controller. A first container is used for storing iso-propyl alcohol liquid. An air pump is connected to the first container via a liquid pipe. The air pump is utilized for sucking the iso-propyl alcohol from the first container and driving the iso-propyl alcohol liquid to flow in the prewet system. An impurity filter is connected to the air pump via a liquid pipe, which is useful for filtering out impurities of the iso-propyl alcohol liquid. A second container is connected to the impurity filter for holding a filter. Between the filter and the second container is a pressure detector for detecting the liquid pressure inside the pipe. The prewet system provides a better prewet effect than the conventional one.
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申请公布号 |
US5733441(A) |
申请公布日期 |
1998.03.31 |
申请号 |
US19960670531 |
申请日期 |
1996.06.27 |
申请人 |
UNITED MICROELECTRONICS CORPORATION |
发明人 |
KO, CHI-YIN;DENG, YU-MIN;YANG, SHING-SHENG;CHIH, HAI |
分类号 |
B01D17/12;B01D37/04;(IPC1-7):B01D17/12 |
主分类号 |
B01D17/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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