| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to cut a work with an internal cavity without causing a significant variation in cutting resistance by cutting the work by bringing it into contact with wire between fabricating rollers in such a state that a dummy material is loaded in the internal cavity of the work. SOLUTION: An inner dummy material 34 of epoxy resin is loaded into the central cavity part 21a of a work 21 of a hollow cylindrical shape, and is fixed with an adhesive to obtain a work 21 of a solid cylindrical shape. Further, a mounting plate 36 of glass is firmly bonded through a carbon 35. In addition, the work 21 is set, in freely detachable manner, on a work support mechanism for a wire saw, and is fabricated by cutting to the specified thickness. Consequently, it is possible to cut the work 21 with an internal cavity without causing a significant variation in cutting resistance. Besides, the variation of the facing roughness in the cut section of a wafer can be inhibited when such a variation is likely to occur depending upon a spot where the cutting takes place. Thus the wafer manufactured is of the high quality under the described damage inhibitory effects. |
