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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH1079425(A)
申请公布日期
1998.03.24
申请号
JP19960253739
申请日期
1996.09.04
申请人
SONY CORP
发明人
KOYAMA KAZUHIDE
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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