发明名称 Semiconductor device having a carrier and a multilayer metallization
摘要 A semiconductor device has a carrier, at least one semiconductor component provided on this carrier, and a multilayer metallization between the semiconductor component and the carrier. A first metal layer of aluminium, gold, or a gold alloy is provided on the surface of the semiconductor component, a second metal layer of titanium is provided on the first metal layer, a third metal layer of nickel is provided on the second metal layer, and a fourth metal layer of a binary or ternary gold-germanium alloy is provided on the third metal layer. The device has a low-ohmic contact resistance and extremely long useful life under temperature loads.
申请公布号 US5731635(A) 申请公布日期 1998.03.24
申请号 US19960692852 申请日期 1996.07.24
申请人 U.S. PHILIPS CORPORATION 发明人 BAREITHER, WOLFGANG;SCHROEDER, HARALD;TOMMALLA, DIETER
分类号 H01L29/43;H01L21/28;H01L21/331;H01L21/60;H01L23/482;H01L23/492;H01L29/73;H01L29/737;H01L29/861;(IPC1-7):H01L23/48 主分类号 H01L29/43
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