| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a highly precise mechanical focusing method for a laser beam machine. SOLUTION: Cutting is performed by moving and positioning a laser machining head at fixed intervals so that a focal point f is set between the upper proximate position and the rear side of a material W to be machined; test patterns with each different groove width are prepared; against the cut grooves of the test patterns, the test pattern with the minimum capacitance is detected by holding constantly an interval between a capacitance sensor provided at the tip end of the laser machining head and the material, moving the head relatively in the direction orthogonally crossing the cut grooves, and measuring the change in the capacitance; the Z-axis coordinate of the laser machining head at the time of cutting the test pattern with the minimum capacitance is made the position where the focal point of a condensing lens is precisely focused on the surface of the material. As a result, the discrimination of the groove width of the test pattern is changed from visually to mechanically, thereby enabling the precise focusing and also improving the machining precision.</p> |
