METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19960233982-传众专利搜索

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发明名称	METHOD AND DEVICE FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH1079348(A)	申请公布日期	1998.03.24
申请号	JP19960233982	申请日期	1996.09.04
申请人	FUJI XEROX CO LTD	发明人	YAGI SHIGERU
分类号	H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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