| 摘要 |
PROBLEM TO BE SOLVED: To stably measure even at the time of narrow pattern pitch by starting a defective or non-defective decision to match contact of an inspecting probe with an initial transparent conductive film (ITO) pattern after starting a tracing operation. SOLUTION: When an inspecting table 1 is moved by a distanceΔL (a deviation of a tracing starting position from an inspection starting position) in an x direction after the table 1 is positioned at the tracing starting position, a voltage supply probe 21 and a pattern detecting probe 2D are brought into contact with a first ITO pattern 7-1 , and a detection voltage from the probe 2D rises. Amechanism controller recognizes that the table 1 arrives at the inspection starting position according to the rising timing, moves the table 1 at a normal tracing speed, and decides defective or non-defective of the patterns 7-1 , 7-2 , according to detection signals of a disconnection detecting prove 20 and short-circuit detecting probe 2S. Thus, the ITO pattern 7 tracing timing can be brought into coincidence with a deciding time, thereby performing the stable inspection.
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