发明名称 |
Polymeric dyes for antireflective coatings |
摘要 |
A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.
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申请公布号 |
US5731385(A) |
申请公布日期 |
1998.03.24 |
申请号 |
US19930168885 |
申请日期 |
1993.12.16 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
KNORS, CHRISTOPHER JOHN;MACY, ELWOOD HERBERT;MOREAU, WAYNE MARTIN |
分类号 |
C08F8/30;C08F8/34;C09B69/10;G03F7/09;(IPC1-7):C08F8/32;C08F22/04 |
主分类号 |
C08F8/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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