发明名称 |
Mass flow controller with vertical purifier |
摘要 |
A mass flow controller and purifier has a canister arranged at right angles to a flow path through the mass flow controller. The canister holds a contaminant scavenging material which a gas stream contacts as it flows to remove a contaminant such as water. A purified process gas stream is fed through a bypass of a mass flow meter. A portion of the gas is supplied to a mass flow sensor which generates a signal indicative of a rate of mass flow. The mass flow signal is amplified and the amplified mass flow signal is linearized in a linearizer. The linearized mass flow signal is fed to a comparator which compares the linearized mass flow signal with an error signal and provides an output signal indicative of a mass rate of flow through the mass flow meter. A valve is connected to the mass flow meter and is controlled by the mass flow meter signal to meter the gas.
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申请公布号 |
US5730181(A) |
申请公布日期 |
1998.03.24 |
申请号 |
US19960758971 |
申请日期 |
1996.12.02 |
申请人 |
UNIT INSTRUMENTS, INC. |
发明人 |
DOYLE, MICHAEL J.;URDANETA, NELSON;VU, KIM N. |
分类号 |
B01D53/04;B01D53/26;G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
B01D53/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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