| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration driving device which is low-cost and which can detect a movement amount with a simple configuration by a method in which the rotation of a guide member is detected by a detection means. SOLUTION: When voltages, at a specific frequency, whose value is different from each other by 90 deg. are applied in a state that an A-phase electrode film and a B-phase electrode film at a vibrator are set to continuity, a piezoelectric element repeats expansion and contraction motions whose phase is different by 90 deg.. As a result, a moving body 4 is moved by an elliptical motion. When the moving body 4 is moved, a guide member 7b which is supported by ball bearings 8b, 8d is turned, and also a light-shielding plate 9 is turned. When the light-shielding plate 9 is turned, a beam of light from a light source at a photointerrupter 10 is shielded intermittently by the light-shielding plate 9. At this time, an intermittent output signal is output from the output terminal of the photointerrupter 10, the output signal is counted by a pulse detection circuit which is connected to the photointerrupter 10, and the movement amount of the moving body 4 can be detected. |
