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发明名称
ILLUMINATOR FOR INSPECTING SUBSTANTIALLY FLAT SURFACES
摘要
申请公布号
IL140248(D0)
申请公布日期
2002.02.10
申请号
IL19980140248
申请日期
1998.06.16
申请人
发明人
分类号
G01N21/88;G01N21/956;G02B5/10;G02B7/182;(IPC1-7):G01N
主分类号
G01N21/88
代理机构
代理人
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