发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To make small and even the bubbles produced in solder in packaging time by a method wherein a backside metallic film having a plurality of aperture parts in a predetermined plane shape mutually arranged at the same intervals made of a material not adhesive to solder exposed in inner surface is provided on the backside of a substrate with a circuit made thereon. SOLUTION: A matching circuit 1 made of a conductive metallic film is formed on the surface of a substrate 2, and a back side metallic film 7 made of a conductive metallic film provided on the entire back surface is normally plates with Au, etc. This back metallic film 7 keeps a small rectangular plate shape. In such a constitution, a plurality of aperture parts 8 exposed in the back side of the substrate 2 are arranged in parallel with one another at specified intervals thereby enabling the back metallic film 7 to take a lattice shape. In this case, the backside of the substrate 2 is exposed in the aperture parts 8, but materials which is not bonded with solder may be provided.
申请公布号 JPH1079397(A) 申请公布日期 1998.03.24
申请号 JP19960233286 申请日期 1996.09.03
申请人 MITSUBISHI ELECTRIC CORP 发明人 MIYAWAKI KATSUMI;USUKI TOSHIO
分类号 H01L21/52 主分类号 H01L21/52
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