Member for production device of semiconductor,申请号SG19960011103-传众专利搜索

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发明名称	Member for production device of semiconductor
摘要
申请公布号	SG47194(A1)	申请公布日期	1998.03.20
申请号	SG19960011103	申请日期	1996.11.13
申请人	SUMITOMO CHEMICAL COMPANY, LIMITED	发明人	IYECHIKA YASUSHI;KATAMIME TOSHIHISA;ONO YOSHINOBU;TAKADA TOMOYUKI
分类号	H01L33/00;(IPC1-7):H01L33/00;H01L21/00	主分类号	H01L33/00
代理机构		代理人
主权项
地址

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