| 发明名称 |
SEMICONDUCTOR WAFER |
| 摘要 |
<p>PURPOSE:To facilitate the exhaust of gas produced and improve the adhesiveness to photo mask by deliberately protruding dicing lines on the outside of an element forming region on a semiconductor wafer with an oxide film.</p> |
| 申请公布号 |
JPS5257783(A) |
申请公布日期 |
1977.05.12 |
| 申请号 |
JP19750133417 |
申请日期 |
1975.11.06 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
OKUTSU KINNOSUKE |
| 分类号 |
H01L21/027;G03F7/20;H01L29/06 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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