MASK SCANNING LASER MARKER AND SCANNING METHOD THEREFOR

摘要

A mask scanning laser marker whose scanning width on a mask surface is variable and whose efficiency of marking is improved. The laser marker is provided between a laser beam generator (1) and a mask (6) with a plurality of sets of relay lenses (50-1, 50-2) wherein each set comprises at least one lens and has a magnification different from that of the other, and a lens replacement means for replacing the relay lenses (50-1, 50-2) with each other by inserting the lens sets between a polygon mirror (3X) and the mask (6), whereby the scanning width on the surface of the mask (6) of a laser beam from the polygon mirror (3X) is variable.