发明名称 METHOD FOR PRODUCING A DRAM CELLULAR ARRANGEMENT
摘要 The invention concerns a DRAM cellular arrangement comprising a vertical MOS transistor in every memory cell. The first source/drain area (4) of said transistor is connected to a storage node of a memory condenser (4, 15, 16), the channel area (3) of which is surrounded annularly by a gate electrode (13). The second source/drain area of the channel area is connected to a buried bit line (2). The DRAM cellular arrangement is produced by using only two masks assisted by a spacer with a memory cell surface of 2F<2>, whereby F represents the minimum structural size that the relevant technology can produce.
申请公布号 WO9811604(A1) 申请公布日期 1998.03.19
申请号 WO1997DE01580 申请日期 1997.07.28
申请人 SIEMENS AKTIENGESELLSCHAFT;ROESNER, WOLFGANG;RISCH, LOTHAR;HOFMANN, FRANZ;STENGL, REINHARD 发明人 ROESNER, WOLFGANG;RISCH, LOTHAR;HOFMANN, FRANZ;STENGL, REINHARD
分类号 H01L21/8242;H01L27/108 主分类号 H01L21/8242
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