摘要 |
Fluorinated polyether compositions having reactive end groups, such as formula (I) can be crosslinked to produce cured films useful as dielectrics for microelectronic applications. Other reactive end groups such as allyl, benzocyclobutyl, N-phenylmaleimido, alkynylphenyl, styryl, allylphenyl, cyanophenyl, and triazenophenyl are also suitable. |
申请人 |
ALLIEDSIGNAL INC., MORRISTOWN, N.J., US |
发明人 |
MERCER, FRANK, W., BELMONT, CA 94002, US;GOODMAN, TIMOTHY, D., REDWOOD CITY, CA 94062, US;LAU, ALDRICH, N., K., PALO ALTO, CA 94303, US;VO, LANCHI, P., SAN JOSE, CA 95148, US |