摘要 |
PURPOSE:To prevent the generation of peeling off and enhance yield by forming a specific reinforced glass ceramic green sheet so that it may be incorporated into a low dielectric glass ceramic green sheet into one piece. CONSTITUTION:A reinforced glass ceramic green sheet is produced by partially replacing borosilicate crown glass with low softening point glass and laminated with a low dielectric glass ceramic green sheet 2 and fired so that it may be possible to obtain a multilayer ceramic circuit substrate where a low dielectric constant layer 5 is incorporated into a reinforced layer into one piece. In this case, the low softening point glass has a low softening point temperature and hence works as a binder for silica glass (SiO2) or mullite (3Al2O3.2SiO2) and thereby increases the density. This construction makes it possible to prevent the generation of peeling off and enhance manufacturing yield. |