| 摘要 |
<p>An apparatusÄ10, 500, 600Ü and method for measuring the thickness of a film Ä15, 216, 315, 415Ü having top and bottom surfaces. The apparatusÄ10, 500, 600Ü includes low coherence light sourceÄ12Ü that generates a probe light signal. The filmÄ15, 216, 315, 415Ü is positioned against a rollerÄ314,460Ü having a partially reflecting surface that is positioned at a fixed distance from the filmÄ15, 216, 315, 415Ü. The probe light signal is applied to the filmÄ15, 216, 315, 415Ü and is then reflected back through the filmÄ15, 216, 315, 415Ü by the partially reflecting surface. The light leaving the filmÄ15, 216, 315, 415Ü is collected to form the input to a receiverÄ18Ü that determines the time delay between light reflected from the top and bottom surfaces of the filmÄ15, 216, 315, 415Ü. The receiver output may also be used to determine the thickness of the various layers in a multi-layer filmÄ15, 216, 315, 415Ü. <IMAGE></p> |
