发明名称 ABNORMAL LOAD DETECTOR FOR BONDING APPARATUS
摘要 PROBLEM TO BE SOLVED: To stop an $ imediately after a trouble occurs and let lilll operator know about the trouble by comparing the current detected by a detecting circuit for bonding load with a reference current and outputting an alarm signal ' representing an abnormal bonding load when the detected current is out of a specified range of the reference current. SOLUTION: Currents applied to a linear motor 15 for bonding load and a linear motor 25 for clamper load are detected by a detecting circuit 32A for bonding load and a detecting circuit 32B for clamper load respectively. The detected currents 32a, 32b are input to a comparing and judging circuit 33. Meanwhile, reference voltages 30a, 30b from a controlling section 30 are convertedR reference currents 34a, 34b by a converting circuit 34 and then are input into the comparing and judging circuit 33. When the detected currents 32a, 32b are out of specified ranges of the reference currents 34a, 34b, an abnormal bonding signal 33a or abnormal clamper signal 33b is output and then the apparatus is stopped and the operator is informed of the trouble by an error indicator 35.
申请公布号 JPH1074789(A) 申请公布日期 1998.03.17
申请号 JP19960247239 申请日期 1996.08.29
申请人 SHINKAWA LTD 发明人 MOCHIDA TORU;TERAKADO YOSHIMITSU;HIRAI NOBUAKI
分类号 H01L21/60 主分类号 H01L21/60
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