| 摘要 |
PROBLEM TO BE SOLVED: To perform the accurate measurement continuously for a long time with excellent response by performing oxygen pumping for a plurality of processing zones, and operating the pumping current flowing through an electro chemical pumping cell as the value of gas to be measured. SOLUTION: A gas sensor 100 sucks the oxygen partial pressure of the atmosphere in a plurality of processing zones and detects the pumping current. A driving part 101 performs oxygen pumping in a plurality of the processing zones in the gas sensor 100. An operating part 102 operates the pumping current flowing through the electrochemical pumping as the value of the gas to be measured. A display output part 103 displays the value operated in the operating part 102 or takes out the value to the outside as the electric output. A heater driving part 104 heats the gas sensor 100 to the specified temperature. With this constitution, even if the oxygen concentration in the gas to be measured becomes high, the device is not affected, the response is excellent continuously and the accurate measurement can be performed for a long time. Even in the measurement of the gas component to be measured of low concentration, the high S/N is obtained. |
