发明名称 MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To improve the adhesion property with a magnetic material as well as the magnetic characteristics by adding Si when a DLC film is formed as a protective film or lubricating film on a magnetic recording medium. SOLUTION: A PET(polyethylene terephthalate) film 11 of 7μm thickness is used as a supporting substrate. The center line average roughness (Ra) of the substrate surface is 3μm. The substrate is supplied in a form of a roll having 400 mm width. Before a DLC film is formed, a magnetic film 12 is preliminarily formed. The magnetic film 12 comprises of a CoNi alloy and is formed to 200nm thickness by vacuum vapor deposition. Then a DLC film 13 is formed while changing the thickness between 10 and 50nm thickness on the magnetic film 12.
申请公布号 JPH1074315(A) 申请公布日期 1998.03.17
申请号 JP19970254313 申请日期 1997.09.02
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 HAYASHI SHIGENORI
分类号 G11B5/66;G11B5/72;(IPC1-7):G11B5/66 主分类号 G11B5/66
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