发明名称 |
MAGNETIC RECORDING MEDIUM |
摘要 |
PROBLEM TO BE SOLVED: To improve the adhesion property with a magnetic material as well as the magnetic characteristics by adding Si when a DLC film is formed as a protective film or lubricating film on a magnetic recording medium. SOLUTION: A PET(polyethylene terephthalate) film 11 of 7μm thickness is used as a supporting substrate. The center line average roughness (Ra) of the substrate surface is 3μm. The substrate is supplied in a form of a roll having 400 mm width. Before a DLC film is formed, a magnetic film 12 is preliminarily formed. The magnetic film 12 comprises of a CoNi alloy and is formed to 200nm thickness by vacuum vapor deposition. Then a DLC film 13 is formed while changing the thickness between 10 and 50nm thickness on the magnetic film 12.
|
申请公布号 |
JPH1074315(A) |
申请公布日期 |
1998.03.17 |
申请号 |
JP19970254313 |
申请日期 |
1997.09.02 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
HAYASHI SHIGENORI |
分类号 |
G11B5/66;G11B5/72;(IPC1-7):G11B5/66 |
主分类号 |
G11B5/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|