Atomic force microscope system with angled cantilever having integral in-plane tip

摘要

An atomic force microscope system incorporates a single-crystal silicon cantilever with an integral tip. The cantilever is supported in the AFM system so that it makes an acute angle with the surface of the sample to be scanned. The tip is formed by the convergence of three planes, one of which is one of the two generally parallel planes which define the thickness of the cantilever. The tip lies between the cantilever's two thickness-defining planar surfaces and is thus an in-plane integral tip. The AFM system may have the cantilever surface that converges to the tip oriented to either face the sample or face away from the sample.