TURBO VACUUM PUMP AND OPERATION SYSTEM THEREFOR

摘要

PROBLEM TO BE SOLVED: To restart even a turbo vacuum pump of which rotors lock after the stop of the pump resulted from the adhesion and deposition of reaction products inside the pump. SOLUTION: Prior to the starting of a turbo vacuum pump 1, a controller 20 controls a magnetic bearing 3 so as to displace the rotors by its suction force to thereby scrape away reaction products therefrom. A heater means is provided to heat the stators prior to the starting of the turbo vacuum pump 1. Even if the rotors lock due to the adhesion and deposition of reaction products inside the pump out of operation, the pump is thus easily restarted owing to the use of advantages of the magnetic bearing including its compete cleanness and feature of requiring no maintenance.