| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an equipment for detecting defect of a high barrier film having transmission coefficient in the range of 10<-14> -10<-11> cm<3> (STP)cm<-2> S<-1> cmHg<1> automatically through a convenient structure. SOLUTION: After a sample holder 2 is evacuated uniformly through an evacuation means 4, a plurality of kinds of gas having different molecular radius are introduced selectively, with the pressure being regulated, from a gas introduction means 3 into an upper enclosed space 16 of the sample holder 2. The introduced gas is held under specified temperature conditions through a control section 8. A gas passed through a barrier film 1 held by the sample holder 2 is detected by a pressure detecting means 5 and pressure rise per unit timeΔp/Δt is determined. Based on the value ofΔP/Δt, an operating means 6 determines transmission coefficient of each gas and a defect is determined based on the ratio thereof. Alternatively, a defect can be determined by measuring the temperature characteristics of transmission coefficient.
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