发明名称 Photoresist stripping compositions
摘要 A non-aqueous negative photoresist stripping composition which consists essentially of about 40 to 80% by weight of an alkylnaphthalene solvent, about 5 to 20% by weight of an alkyl phenol which provides a corrosion inhibitory effect, about 5 to 20% by weight of a linear monoalkylbenzene sulfonic acid which is a surfactant and about 1 to 10% by weight of a dialkylbenzene sulfonic acid. There is further provided a process for removing coatings from a photoresist with the compositions of the invention.
申请公布号 US5728664(A) 申请公布日期 1998.03.17
申请号 US19960631921 申请日期 1996.04.15
申请人 ASHLAND, INC. 发明人 MICHELOTTI, FRANCIS W.
分类号 C11D1/22;C11D3/18;C11D3/20;C11D3/34;G03F7/42;(IPC1-7):C11D3/18;C11D1/831;C11D1/83 主分类号 C11D1/22
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