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发明名称
SEMICONDUCTOR-DEVICE TESTING APPARATUS
摘要
申请公布号
JPH1073645(A)
申请公布日期
1998.03.17
申请号
JP19970159013
申请日期
1997.06.16
申请人
ADVANTEST CORP
发明人
MIURA TAKEO
分类号
G01R31/28;G01R31/319;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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