| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacing mirror device capable of stably changing an optical path length, controlling at high speed without causing vibration. SOLUTION: A weight (balance mass) 103 is attached on the other end of a piezoelectric actuator 101 attaching a reflection mirror 102 on one end, the piezoelectric actuator 101 is fixed by a supporting frame 104 on a point (a fixed point) in the longitudinal direction and the product ML of the mass M of the reflection mirror 102 and a distance L from the fixed point to the reflection mirror 102 is made equal to the product M'L' of the mass M' of the weight and the distance L' from the fixed point to the weight (ML=M'L'). The reaction exerted on the reflection mirror 102 and the reaction exerted on the weight are mutually canceled on the fixed point, since force is not exerted on the fixed point or a mount for holding the point, the induction of vibration is prevented. |
