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发明名称
DEPOSITION APPARATUS
摘要
申请公布号
KR20060060125(A)
申请公布日期
2006.06.05
申请号
KR20040099013
申请日期
2004.11.30
申请人
LG ELECTRONICS INC.
发明人
JEONG, SEOK HWA;KIM, SEOK JOO;KIM, SANG JEON;SHIN, SEONG HWAN
分类号
C23C14/24
主分类号
C23C14/24
代理机构
代理人
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地址
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