发明名称 Raised fuse structure for laser repair
摘要 A novel raised polycide fusible link structure is described. This structure enables a highly reliable laser-cutting process to be used in which the fuse can be easily and totally severed over a wide range of laser energy levels. The primary feature of the structure is that the fusible link is located on a pedestal that raises it above the surface of the main body of the integrated circuit, thereby providing a measure of thermal isolation for the fuse when it is irradiated by the laser. An efficient process for manufacturing the structure is also described.
申请公布号 US5729042(A) 申请公布日期 1998.03.17
申请号 US19970831877 申请日期 1997.04.02
申请人 VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION 发明人 LOU, YUNG-SONG;ROU, CHING-CHERNG;CHOU, TING;KOH, CHAO-MING;LEE, SHIN-CHI;CHEN, CHUEN-NAN
分类号 A61K38/00;C07K14/47;H01L23/525;(IPC1-7):H01L29/00 主分类号 A61K38/00
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