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发明名称
MULTILAYER INTERCONNECTION SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH1074838(A)
申请公布日期
1998.03.17
申请号
JP19960228923
申请日期
1996.08.29
申请人
NEC YAMAGUCHI LTD
发明人
SAKAMOTO KENICHI
分类号
H01L21/82;(IPC1-7):H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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