| 发明名称 |
SEMICONDUCTOR INTEGRATED CIRCUIT ELEMENT AND ITS MANUFACTURE, AND METHOD AND APPARATUS FOR FORMING TITANIUM SILICIDE OF SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
JPH1074711(A) |
申请公布日期 |
1998.03.17 |
| 申请号 |
JP19960357095 |
申请日期 |
1996.12.26 |
| 申请人 |
HYUNDAI ELECTRON IND CO LTD |
发明人 |
PARK BO-HYUN |
| 分类号 |
H01L21/28;H01L21/285;H01L21/336;H01L29/45;H01L29/49;H01L29/78;(IPC1-7):H01L21/285 |
主分类号 |
H01L21/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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