| 摘要 |
PROBLEM TO BE SOLVED: To provide a polarizing optical element excellent in environmental resistance and high in reliability and to unnecessitate an unstable etching process. SOLUTION: In the polarizing optical element separating incident light on a metallic grating 3 formed on a substrate 1 at prescribed intervals into transmitted light and reflected light corresponding to a polarization direction, the metallic grating 3 is formed on a ground film 2 and the bed film 2 is a transparent metallic oxide film 3d. The polarizing optical element is manufactured by a process for forming the ground film 2 made of a conductive metal on the substrate 1, a process for forming a resist pattern thereon by an electron beam drawing, a process for forming a metallic film with prescribed film thickness, a process for forming the metallic grating 3 by selectively removing the metallic film by a lift-off method and a process for oxidizing the ground film 2 by heat- treatment to make the film transparent and for forming an oxidized coating film 3a on a surface of the metallic grating 3. |
