| 摘要 |
PROBLEM TO BE SOLVED: To quickly detect defects in a pattern with a constitution of small capacity. SOLUTION: A master pattern setting processing for setting up the position of a master pattern against a camera is executed (100), and master data are prepared based on the vertical/horizontal run length codes of the master pattern (102). Then, prepared pattern setting processing for setting up the position of the prepared pattern to be compared against the camera is executed (104), the vertical/horizontal run length codes of the prepared pattern are generated for each pixel and the generated data are compared with the master data to detect defects in the prepared pattern (106). The processing is executed for all prepared patterns until the detect detection is completed (108). |
