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发明名称
PROBE CARD
摘要
申请公布号
JPH1073616(A)
申请公布日期
1998.03.17
申请号
JP19960228744
申请日期
1996.08.29
申请人
NEC KYUSHU LTD
发明人
IWAMOTO SHINICHI
分类号
G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/073
代理机构
代理人
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地址
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