WASHING METHOD,申请号JP19970177153-传众专利搜索

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发明名称	WASHING METHOD
摘要
申请公布号	JPH1071375(A)	申请公布日期	1998.03.17
申请号	JP19970177153	申请日期	1997.07.02
申请人	TOSHIBA CORP	发明人	SAKURAI NAOAKI;NISHIGAKI HISASHI;HAYAMIZU NAOYA;FUJITA HIROSHI
分类号	B08B3/10;B08B3/12;C02F1/46;C11D7/00;H01L21/00;H01L21/304;(IPC1-7):B08B3/10	主分类号	B08B3/10
代理机构		代理人
主权项
地址

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